Epitaxial (EPI) Silicon Wafer

Whakaahuatanga

Epitaxial Silicon WaferKo te EPI Silicon Wafer ranei, he angiangi o te paparanga karaehe semiconducting kua whakatakotoria ki runga i te mata kiriata whakakoi o te tïpako silicon na te tipu epitaxial.Ko te paparanga epitaxial pea he rite tonu te rauemi ki te tïpako na te tipu epitaxial homogeneous, he paparanga o waho ranei me te kounga e hiahiatia ana e te tipu epitaxial heterogeneous, e tango ana i te hangarau tipu epitaxial tae atu ki te CVD kohu matū, te wahanga wai epitaxy LPE, me te kurupae ngota. epitaxy MBE ki te whakatutuki i te kounga teitei o te kiato koha iti me te taratara mata pai.Ko te Silicon Epitaxial Wafers e whakamahia ana ki te hanga i nga taputapu semiconductor matatau, nga huānga semiconductor tino whakauru ICs, nga taputapu motuhake me te hiko, ka whakamahia hoki mo te huānga o te diode me te transistor, te taputapu ranei mo te IC penei i te momo bipolar, MOS me nga taputapu BiCMOS.I tua atu, he maha nga paparanga epitaxial me te kiriata matotoru EPI silicon wafers e whakamahia ana i roto i te microelectronics, photonics me te tono photovoltaics.

Tukunga

Epitaxial Silicon Wafers, EPI Silicon Wafer ranei i Western Minmetals (SC) Corporation ka taea te tuku i te rahi o te 4, 5 me te 6 inihi (100mm, 125mm, 150mm diameter), me te whakatakotoranga <100>, <111>, te parenga epilayer o <1ohm -cm ranei ki runga ki te 150ohm-cm, me te epilayer matotoru o<1um ranei ki runga ki te 150um, ki te makona nga momo whakaritenga i roto i te mutunga o te mata o te etched maimoatanga LTO ranei, Kikī i roto i te rīpene me te pouaka kātene i waho, ranei rite ki te whakaritenga whakaritenga ki te otinga tino. .

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Whakatakotoranga Hangarau

Epi Silicon Wafer

Epitaxial Silicon WafersKo te EPI Silicon Wafer ranei i Western Minmetals (SC) Corporation ka taea te tuku i te rahi o te 4, 5 me te 6 inihi (100mm, 125mm, 150mm diameter), me te takotoranga <100>, <111>, te parenga epilayer o <1ohm-cm ranei ki runga ki te 150ohm-cm, me te epilayer matotoru o<1um ki runga ranei ki te 150um, ki te whakatutuki i nga momo whakaritenga i roto i te mutunga o te mata o te maimoatanga etched ranei LTO, Kikī i roto i te rīpene me te pouaka kātene i waho, ranei rite ki te whakaritenga whakaritenga ki te otinga tino.

Tohu	Si
Tau ngota	14
Taumaha ngota	28.09
Kāwai Huānga	Metalloid
Roopu, Waa, Poraka	14, 3, P
Hanganga tioata	Taimana
Tae	Hina pouri
Te Whakarewa	1414°C, 1687.15 K
Kohuatanga	3265°C, 3538.15 K
Kiato i te 300K	2.329 g/cm³
Te parenga o roto	3.2E5 Ω-cm
Tau CAS	7440-21-3
Tau EC	231-130-8

Kao.	Nga taonga	Whakatakotoranga Paerewa
1	Nga ahuatanga whanui
1-1	Rahi	4"	5"	6"
1-2	Diamita mm	100±0.5	125±0.5	150±0.5
1-3	Takotoranga	<100>, <111>	<100>, <111>	<100>, <111>
2	Nga Ahuatanga Paparanga Epitaxial
2-1	Tikanga Tipu	CVD	CVD	CVD
2-2	Momo Kawenga	P, P+ ranei, N/ N+ ranei	P, P+ ranei, N/ N+ ranei	P, P+ ranei, N/ N+ ranei
2-3	Mātotoru μm	2.5-120	2.5-120	2.5-120
2-4	Tauritenga Matotoru	≤3%	≤3%	≤3%
2-5	Te parenga Ω-cm	0.1-50	0.1-50	0.1-50
2-6	Tauritenga Tauritenga	≤3%	≤5%	-
2-7	Wehenga cm-2	<10	<10	<10
2-8	Kounga Mata	Karekau he maramara, he kohu, he kiri karaka ranei e toe ana, aha atu.
3	Kakau i nga ahuatanga o te papanga
3-1	Tikanga Tipu	CZ	CZ	CZ
3-2	Momo Kawenga	P/N	P/N	P/N
3-3	Mātotoru μm	525-675	525-675	525-675
3-4	Matotoru Tauritenga max	3%	3%	3%
3-5	Te parenga Ω-cm	Ka rite ki te hiahia	Ka rite ki te hiahia	Ka rite ki te hiahia
3-6	Tauritenga Tauritenga	5%	5%	5%
3-7	TTV μm mōrahi	10	10	10
3-8	Kopere μm mōrahi	30	30	30
3-9	μm morahi	30	30	30
3-10	EPD cm-2 te teitei	100	100	100
3-11	Kōtaha Tapa	Porowhita	Porowhita	Porowhita
3-12	Kounga Mata	Karekau he maramara, he kohu, he kiri karaka ranei e toe ana, aha atu.
3-13	Taha Whakamuri	Kua tuhia, LTO ranei (5000±500Å)
4	Tarapi	Ripene ki roto, pouaka kaata ki waho.

Silicon Epitaxial Waferska whakamahia i roto i te hanga o nga taputapu semiconductor matatau, nga huānga semiconductor tino whakauru ICs, nga taputapu motuhake me te hiko, ka whakamahia hoki mo te huānga o te diode me te transistor, te taputapu ranei mo te IC penei i te momo bipolar, MOS me nga taputapu BiCMOS.I tua atu, he maha nga paparanga epitaxial me te kiriata matotoru EPI silicon wafers e whakamahia ana i roto i te microelectronics, photonics me te tono photovoltaics.