Whakaahuatanga
Silicon Carbide Wafer SiC, he tino uaua, he mea hanga hangai hangai te pūhui tioata o te silicon me te waro na te tikanga MOCVD, me te whakaatuko tona whanui whanui motuhake me etahi atu ahuatanga pai o te iti o te whakarea o te roha waiariki, teitei ake te pāmahana whakahaere, te pai o te wera o te wera, te iti o te whakawhiti me te whakahekenga o te kawe, te pai ake o te kaha, te kaha o te waiariki me te kaha o te pakaru o te papa hiko, me te kaha ake o te kaha. huru.Ka taea te whakarato Silicon Carbide SiC i Western Minmetals (SC) Corporation i te rahi o te 2″ 3'4“ me te 6″ (50mm, 75mm, 100mm, 150mm) te diameter, me te momo-n, ahua-insulating, he angiangi angiangi mo te ahumahi. me te tono taiwhanga.Ko nga whakaritenga kua whakaritea mo te otinga tino pai ki o taatau kaihoko puta noa i te ao.
Nga tono
Ko te kounga teitei 4H / 6H Silicon Carbide SiC wafer he tino pai mo te hanga i te maha o nga taputapu hihiko tere, teitei-te-mahana me te ngaohiko teitei penei i nga diodes Schottky & SBD, nga MOSFET me nga JFET, me era atu. he rauemi e hiahiatia ana mo te rangahau me te whakawhanaketanga o nga transistors bipolar me te thyristors.He mea tino pai mo te whakatipuranga hou, ko te angiangi a Silicon Carbide SiC ka mahi ano hei whakamaarama wera pai i roto i nga waahanga rama hiko-nui, hei taputapu pumau me te rongonui mo te whakatipu i te paparanga GaN hei pai mo nga rangahau rangahauiao e whai ake nei.
Whakatakotoranga Hangarau
Silicon Carbide SiCi Western Minmetals (SC) Corporation ka taea te whakarato i te rahi o te 2 ″ 3' 4 "me te 6" (50mm, 75mm, 100mm, 150mm) te diameter, me te momo-n, ahua-waahanga, he angiangi taiwhanga ranei mo te tono ahumahi me te taiwhanga. .Ko tetahi whakaritenga kua whakaritea mo te otinga tino pai ki o taatau kaihoko puta noa i te ao.
Tātai Raina | SiC |
Taumaha rāpoi | 40.1 |
Hanganga tioata | Wurtzite |
Te ahua | Mārō |
Te Whakarewa | 3103±40K |
Kohuatanga | N/A |
Kiato i te 300K | 3.21 g/cm3 |
Aputa Pungao | (3.00-3.23) eV |
Te parenga o roto | >1E5 Ω-cm |
Tau CAS | 409-21-2 |
Tau EC | 206-991-8 |
Kao. | Nga taonga | Whakatakotoranga Paerewa | |||
1 | Rahi SiC | 2" | 3" | 4" | 6" |
2 | Diamita mm | 50.8 0.38 | 76.2 0.38 | 100 0.5 | 150 0.5 |
3 | Tikanga Tipu | MOCVD | MOCVD | MOCVD | MOCVD |
4 | Momo Kawenga | 4H-N, 6H-N, 4H-SI, 6H-SI | |||
5 | Te parenga Ω-cm | 0.015-0.028;0.02-0.1;>1E5 | |||
6 | Takotoranga | 0°±0.5°;4.0° ki te <1120> | |||
7 | Mātotoru μm | 330±25 | 330±25 | (350-500)±25 | (350-500)±25 |
8 | Tauwāhi Papa Tuatahi | <1-100>±5° | <1-100>±5° | <1-100>±5° | <1-100>±5° |
9 | Te roa papatahi tuatahi mm | 16±1.7 | 22.2±3.2 | 32.5±2 | 47.5±2.5 |
10 | Wāhi Papatahi Tuarua | Te anga o te Silicon ki runga: 90°, te karaka mai i te papa tuatahi ±5.0° | |||
11 | Te roa papatahi tuarua mm | 8±1.7 | 11.2±1.5 | 18±2 | 22±2.5 |
12 | TTV μm mōrahi | 15 | 15 | 15 | 15 |
13 | Kopere μm mōrahi | 40 | 40 | 40 | 40 |
14 | μm morahi | 60 | 60 | 60 | 60 |
15 | Tapa Whakakore mm te teitei | 1 | 2 | 3 | 3 |
16 | Micropipe kiato cm-2 | <5, ahumahi;<15, taiwhanga;<50, tanga | |||
17 | Wehenga cm-2 | <3000, ahumahi;<20000, taiwhanga;<500000, ware | |||
18 | Te Roopu Mata nm max | 1(Kōrohia), 0.5 (CMP) | |||
19 | Kapiti | Kore, mo te reanga ahumahi | |||
20 | Papa Hexagonal | Kore, mo te reanga ahumahi | |||
21 | Nga karawarawa | ≤3mm, te roa katoa iti iho i te diameter tïpako | |||
22 | Tipi Tipi | Kore, mo te reanga ahumahi | |||
23 | Tarapi | Ko te ipu angiangi kotahi kua hiri ki te peeke hiato konumohe. |
Silicon Carbide SiC 4H/6HHe tino pai te angiangi o te kounga teitei mo te hanga i te maha o nga taputapu hiko tere, teitei me te ngaohiko hiko penei i te Schottky diodes & SBD, nga MOSFET me te JFET, me era atu. rangahau me te whakawhanaketanga o nga transistors bipolar me te thyristors.He mea tino pai mo te whakatipuranga hou, ko te angiangi a Silicon Carbide SiC ka mahi ano hei whakamaarama wera pai i roto i nga waahanga rama hiko-nui, hei taputapu pumau me te rongonui mo te whakatipu i te paparanga GaN hei pai mo nga rangahau rangahauiao e whai ake nei.
Tohutohu Hokonga
Silicon Carbide SiC